SiC based Miniaturized Devices
MEMS devices are found in many of today’s electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks for i...
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Year of Publication: | 2020 |
Language: | English |
Physical Description: | 1 electronic resource (170 pages) |
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