Semiconductor measurement technology : workshop on mass flow measurement and control for the semiconductor industry

Semiconductor measurement technology : workshop on mass flow measurement and control for the semiconductor industry / Robert F. Berg ...

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Bibliographic Details
Superior document:NIST special publications 400-101
HerausgeberIn:
Berg, Robert F.
Place / Publishing House:Washington, DC, 2001
Year of Publication:2001
Language:English
Series:NIST special publications 400-101
Physical Description:IV, 86 S.; Ill., graph. Darst.; 28 cm
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Washington, DC 2001
IV, 86 S. Ill., graph. Darst. 28 cm
NIST special publications 400-101
Berg, Robert F. edt
(AT-OBV)AC00350863 400-101
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language English
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author2 Berg, Robert F.
author_facet Berg, Robert F.
author2_variant r f b rf rfb
author2_role HerausgeberIn
title Semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry
spellingShingle Semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry
NIST special publications
title_sub workshop on mass flow measurement and control for the semiconductor industry
title_full Semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry Robert F. Berg ...
title_fullStr Semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry Robert F. Berg ...
title_full_unstemmed Semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry Robert F. Berg ...
title_auth Semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry
title_new Semiconductor measurement technology
title_sort semiconductor measurement technology workshop on mass flow measurement and control for the semiconductor industry
series NIST special publications
series2 NIST special publications
publishDate 2001
physical IV, 86 S. Ill., graph. Darst. 28 cm
callnumber-raw 100317.400/101
callnumber-search 100317.400/101
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