Semiconductor measurement technology : workshop on mass flow measurement and control for the semiconductor industry / Robert F. Berg ...
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| Superior document: | NIST special publications 400-101 |
|---|---|
| HerausgeberIn: | |
| Place / Publishing House: | Washington, DC, 2001 |
| Year of Publication: | 2001 |
| Language: | English |
| Series: | NIST special publications
400-101 |
| Physical Description: | IV, 86 S.; Ill., graph. Darst.; 28 cm |
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OeAW BAS:IS (Library, Archiv, Collections)
| Location: | BASIS-Journals TSP |
| Call Numbers: | 100317.400/101 |
| Call Number | 2nd Call Number | Description | Location | Remarks | Status | Availability | Order |
|---|---|---|---|---|---|---|---|
| 100317.400/101 | BASIS-Journals TSP | Loan | Available | Place a Hold |