Semiconductor measurement technology : workshop on mass flow measurement and control for the semiconductor industry / Robert F. Berg ...
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| Superior document: | NIST special publications 400-101 |
|---|---|
| HerausgeberIn: | |
| Place / Publishing House: | Washington, DC, 2001 |
| Year of Publication: | 2001 |
| Language: | English |
| Series: | NIST special publications
400-101 |
| Physical Description: | IV, 86 S.; Ill., graph. Darst.; 28 cm |
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| 245 | 0 | 0 | |a Semiconductor measurement technology |b workshop on mass flow measurement and control for the semiconductor industry |c Robert F. Berg ... |
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| 300 | |a IV, 86 S. |b Ill., graph. Darst. |c 28 cm | ||
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