Wafer fabrication : : automated material handling systems /

Wafer fabrication : : automated material handling systems / / Jie Zhang [and five others].

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Bibliographic Details
VerfasserIn:
Zhang, Jie, 1963 September 21-
Place / Publishing House:Berlin ;, Boston : : De Gruyter,, [2018]
2018
Year of Publication:2018
Language:English
Online Access:
Physical Description:1 online resource (284 pages)
Notes:Includes index.
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id 5005574735
ctrlnum (MiAaPQ)5005574735
(Au-PeEL)EBL5574735
(OCoLC)1059296326
collection bib_alma
record_format marc
spelling Zhang, Jie, 1963 September 21- author.
Wafer fabrication : automated material handling systems / Jie Zhang [and five others].
Berlin ; Boston : De Gruyter, [2018]
2018
1 online resource (284 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Includes index.
Description based on print version record.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Semiconductor wafers Automatic control.
Manufacturing processes Automatic control.
Electronic books.
Print version: Zhang, Jie. Wafer fabrication : automated material handling systems. Berlin ; Boston : De Gruyter, c2018 284 pages 9783110486902
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5574735 Click to View
language English
format eBook
author Zhang, Jie, 1963 September 21-
spellingShingle Zhang, Jie, 1963 September 21-
Wafer fabrication : automated material handling systems /
author_facet Zhang, Jie, 1963 September 21-
author_variant j z jz
author_role VerfasserIn
author_sort Zhang, Jie, 1963 September 21-
title Wafer fabrication : automated material handling systems /
title_sub automated material handling systems /
title_full Wafer fabrication : automated material handling systems / Jie Zhang [and five others].
title_fullStr Wafer fabrication : automated material handling systems / Jie Zhang [and five others].
title_full_unstemmed Wafer fabrication : automated material handling systems / Jie Zhang [and five others].
title_auth Wafer fabrication : automated material handling systems /
title_new Wafer fabrication :
title_sort wafer fabrication : automated material handling systems /
publisher De Gruyter,
publishDate 2018
physical 1 online resource (284 pages)
isbn 9783110487473
9783110486902
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871.85 Z436 42018
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5574735
illustrated Not Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.395
dewey-sort 3621.395
dewey-raw 621.395
dewey-search 621.395
oclc_num 1059296326
work_keys_str_mv AT zhangjie waferfabricationautomatedmaterialhandlingsystems
status_str n
ids_txt_mv (MiAaPQ)5005574735
(Au-PeEL)EBL5574735
(OCoLC)1059296326
carrierType_str_mv cr
is_hierarchy_title Wafer fabrication : automated material handling systems /
_version_ 1792330995161104384
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