Wafer fabrication : : automated material handling systems / / Jie Zhang [and five others].
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| Place / Publishing House: | Berlin ;, Boston : : De Gruyter,, [2018] 2018 |
| Year of Publication: | 2018 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (284 pages) |
| Notes: | Includes index. |
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| LEADER | 01623nam a2200397 i 4500 | ||
|---|---|---|---|
| 001 | 5005574735 | ||
| 003 | MiAaPQ | ||
| 005 | 20200128150858.0 | ||
| 006 | m o d | | ||
| 007 | cr cnu|||||||| | ||
| 008 | 200128s2018 gw o 001 0 eng d | ||
| 020 | |z 9783110486902 | ||
| 020 | |a 9783110487473 |q (electronic bk.) | ||
| 035 | |a (MiAaPQ)5005574735 | ||
| 035 | |a (Au-PeEL)EBL5574735 | ||
| 035 | |a (OCoLC)1059296326 | ||
| 040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7871.85 |b .Z436 2018 | |
| 082 | 0 | |a 621.395 |2 23 | |
| 100 | 1 | |a Zhang, Jie, |d 1963 September 21- |e author. | |
| 245 | 1 | 0 | |a Wafer fabrication : |b automated material handling systems / |c Jie Zhang [and five others]. |
| 264 | 1 | |a Berlin ; |a Boston : |b De Gruyter, |c [2018] | |
| 264 | 4 | |c 2018 | |
| 300 | |a 1 online resource (284 pages) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 500 | |a Includes index. | ||
| 588 | |a Description based on print version record. | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Semiconductor wafers |x Automatic control. | |
| 650 | 0 | |a Manufacturing processes |x Automatic control. | |
| 655 | 4 | |a Electronic books. | |
| 776 | 0 | 8 | |i Print version: |a Zhang, Jie. |t Wafer fabrication : automated material handling systems. |d Berlin ; Boston : De Gruyter, c2018 |h 284 pages |z 9783110486902 |
| 797 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5574735 |z Click to View |