Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1901 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2018. {copy}2018. |
| Year of Publication: | 2018 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (71 pages) |
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Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig sammanfattning
- Preface
- Acknowledgements
- Introduction
- Purpose and outline
- Silicon nitride and silicon nitride-based materials
- Silicon nitride
- Silicon oxynitride
- Silicon carbonitride
- Thin film deposition and process characterization
- Magnetron sputtering
- High power impulse magnetron sputtering
- Reactive sputtering
- Sputtering with different reactive gases
- Plasma characterization
- Langmuir probe measurements
- Mass spectrometry
- Experimental details of thin film deposition
- Thin film characterization
- X-ray photoelectron spectroscopy
- Elastic recoil detection analysis
- X-ray reflectivity
- Raman spectroscopy
- Transmission electron microscopy
- Residual stress measurement
- Nanoindentation
- Spectroscopic ellipsometry
- Summary of included publications
- Bibliography
- Included publications and author's contribution.