Showing 1 - 2 results of 2 for search 'Hänninen, Tuomas.', query time: 0.04s Refine Results
1
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
Participants: Hänninen, Tuomas. [ ]
Published: 2018.
Superior document: Linköping Studies in Science and Technology. Dissertations Series ; v.1901
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2
Silicon Oxynitride Thin Films Grown by Reactive HiPIMS.
Participants: Hänninen, Tuomas. [ ]
Published: 2015.
Superior document: Linköping Studies in Science and Technology. Thesis Series ; v.1737
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