Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
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Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1901 |
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Place / Publishing House: | Linköping : : Linkopings Universitet,, 2018. {copy}2018. |
Year of Publication: | 2018 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Online Access: | |
Physical Description: | 1 online resource (71 pages) |
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5005301864 |
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(MiAaPQ)5005301864 (Au-PeEL)EBL5301864 (CaPaEBR)ebr11513064 (OCoLC)1024285686 |
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Hänninen, Tuomas. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. 1st ed. Linköping : Linkopings Universitet, 2018. {copy}2018. 1 online resource (71 pages) text txt rdacontent computer c rdamedia online resource cr rdacarrier Linköping Studies in Science and Technology. Dissertations Series ; v.1901 Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution. Description based on publisher supplied metadata and other sources. Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. Electronic books. Print version: Hänninen, Tuomas Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering Linköping : Linkopings Universitet,c2018 ProQuest (Firm) Linköping Studies in Science and Technology. Dissertations Series https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5301864 Click to View |
language |
English |
format |
eBook |
author |
Hänninen, Tuomas. |
spellingShingle |
Hänninen, Tuomas. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. Linköping Studies in Science and Technology. Dissertations Series ; Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution. |
author_facet |
Hänninen, Tuomas. |
author_variant |
t h th |
author_sort |
Hänninen, Tuomas. |
title |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
title_full |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
title_fullStr |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
title_full_unstemmed |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
title_auth |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
title_new |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
title_sort |
silicon nitride based coatings grown by reactive magnetron sputtering. |
series |
Linköping Studies in Science and Technology. Dissertations Series ; |
series2 |
Linköping Studies in Science and Technology. Dissertations Series ; |
publisher |
Linkopings Universitet, |
publishDate |
2018 |
physical |
1 online resource (71 pages) |
edition |
1st ed. |
contents |
Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution. |
isbn |
9789176853740 |
genre |
Electronic books. |
genre_facet |
Electronic books. |
url |
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5301864 |
illustrated |
Not Illustrated |
oclc_num |
1024285686 |
work_keys_str_mv |
AT hanninentuomas siliconnitridebasedcoatingsgrownbyreactivemagnetronsputtering |
status_str |
n |
ids_txt_mv |
(MiAaPQ)5005301864 (Au-PeEL)EBL5301864 (CaPaEBR)ebr11513064 (OCoLC)1024285686 |
carrierType_str_mv |
cr |
hierarchy_parent_title |
Linköping Studies in Science and Technology. Dissertations Series ; v.1901 |
is_hierarchy_title |
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. |
container_title |
Linköping Studies in Science and Technology. Dissertations Series ; v.1901 |
marc_error |
Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ] |
_version_ |
1792331054447591424 |
fullrecord |
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