Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.

Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.

Saved in:
Bibliographic Details
Superior document:Linköping Studies in Science and Technology. Dissertations Series ; v.1901
:
Hänninen, Tuomas.
Place / Publishing House:Linköping : : Linkopings Universitet,, 2018.
{copy}2018.
Year of Publication:2018
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Dissertations Series
Online Access:
Physical Description:1 online resource (71 pages)
Tags: Add Tag
No Tags, Be the first to tag this record!
id 5005301864
ctrlnum (MiAaPQ)5005301864
(Au-PeEL)EBL5301864
(CaPaEBR)ebr11513064
(OCoLC)1024285686
collection bib_alma
record_format marc
spelling Hänninen, Tuomas.
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
1st ed.
Linköping : Linkopings Universitet, 2018.
{copy}2018.
1 online resource (71 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Dissertations Series ; v.1901
Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution.
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Hänninen, Tuomas Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering Linköping : Linkopings Universitet,c2018
ProQuest (Firm)
Linköping Studies in Science and Technology. Dissertations Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5301864 Click to View
language English
format eBook
author Hänninen, Tuomas.
spellingShingle Hänninen, Tuomas.
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
Linköping Studies in Science and Technology. Dissertations Series ;
Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution.
author_facet Hänninen, Tuomas.
author_variant t h th
author_sort Hänninen, Tuomas.
title Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
title_full Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
title_fullStr Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
title_full_unstemmed Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
title_auth Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
title_new Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
title_sort silicon nitride based coatings grown by reactive magnetron sputtering.
series Linköping Studies in Science and Technology. Dissertations Series ;
series2 Linköping Studies in Science and Technology. Dissertations Series ;
publisher Linkopings Universitet,
publishDate 2018
physical 1 online resource (71 pages)
edition 1st ed.
contents Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution.
isbn 9789176853740
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5301864
illustrated Not Illustrated
oclc_num 1024285686
work_keys_str_mv AT hanninentuomas siliconnitridebasedcoatingsgrownbyreactivemagnetronsputtering
status_str n
ids_txt_mv (MiAaPQ)5005301864
(Au-PeEL)EBL5301864
(CaPaEBR)ebr11513064
(OCoLC)1024285686
carrierType_str_mv cr
hierarchy_parent_title Linköping Studies in Science and Technology. Dissertations Series ; v.1901
is_hierarchy_title Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.
container_title Linköping Studies in Science and Technology. Dissertations Series ; v.1901
marc_error Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ]
_version_ 1792331054447591424
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02587nam a22003853i 4500</leader><controlfield tag="001">5005301864</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20240229073831.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cnu||||||||</controlfield><controlfield tag="008">240229s2018 xx o ||||0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9789176853740</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5005301864</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL5301864</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr11513064</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1024285686</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="e">pn</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Hänninen, Tuomas.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1st ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Linköping :</subfield><subfield code="b">Linkopings Universitet,</subfield><subfield code="c">2018.</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">{copy}2018.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (71 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series ;</subfield><subfield code="v">v.1901</subfield></datafield><datafield tag="505" ind1="0" ind2=" "><subfield code="a">Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution.</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on publisher supplied metadata and other sources.</subfield></datafield><datafield tag="590" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. </subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Hänninen, Tuomas</subfield><subfield code="t">Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering</subfield><subfield code="d">Linköping : Linkopings Universitet,c2018</subfield></datafield><datafield tag="797" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=5301864</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>

Similar Items