Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering.

• Superior document: Linköping Studies in Science and Technology. Dissertations Series ; v.1901
• Author: Hänninen, Tuomas.
• Place / Publishing House: Linköping : : Linkopings Universitet,, 2018.; {copy}2018.
• Year of Publication: 2018
• Edition: 1st ed.
• Language: English
• Series: Linköping Studies in Science and Technology. Dissertations Series
• Physical Description: 1 online resource (71 pages)

Table of Contents

Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution.