Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

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National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
TeilnehmendeR:
ProQuest (Firm)
Year of Publication:1992
Language:English
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Physical Description:xii, 89 p. :; ill.
Notes:"NMAB-461."
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spelling National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Washington, D.C. : National Academy Press, 1992.
xii, 89 p. : ill.
"NMAB-461."
Includes bibliographical references.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectronics industry.
Molecular beams Industrial applications.
Microelectronics Materials.
Plasma-enhanced chemical vapor deposition Industrial applications.
Electronic books.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3376029 Click to View
language English
format Electronic
eBook
author2 ProQuest (Firm)
author_facet ProQuest (Firm)
National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
ProQuest (Firm)
author2_role TeilnehmendeR
author_corporate National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
ProQuest (Firm)
author_sort National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
title Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
spellingShingle Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
title_sub report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
title_full Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
title_fullStr Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
title_full_unstemmed Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
title_auth Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
title_new Beam technologies for integrated processing
title_sort beam technologies for integrated processing report of the committee on beam technologies: opportunities in attaining fully-integrated processing systems, national materials advisory board, commission on engineering and technical systems, national research council.
publisher National Academy Press,
publishDate 1992
physical xii, 89 p. : ill.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7836
callnumber-sort TK 47836 N37 41992
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3376029
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 923260597
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is_hierarchy_title Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
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