Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Saved in:
| : | |
|---|---|
| TeilnehmendeR: | |
| Year of Publication: | 1992 |
| Language: | English |
| Online Access: | |
| Physical Description: | xii, 89 p. :; ill. |
| Notes: | "NMAB-461." |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01736nam a2200385 a 4500 | ||
|---|---|---|---|
| 001 | 5003376029 | ||
| 003 | MiAaPQ | ||
| 005 | 20200520144314.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 920422s1992 dcua sb 000 0 eng | ||
| 010 | |z 92060205 | ||
| 020 | |z 0309046351 | ||
| 035 | |a (MiAaPQ)5003376029 | ||
| 035 | |a (Au-PeEL)EBL3376029 | ||
| 035 | |a (CaPaEBR)ebr10055022 | ||
| 035 | |a (CaONFJC)MIL21147 | ||
| 035 | |a (OCoLC)923260597 | ||
| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7836 |b .N37 1992 | |
| 082 | 0 | 4 | |a 621.381 |2 20 |
| 110 | 2 | |a National Research Council (U.S.). |b Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. | |
| 245 | 1 | 0 | |a Beam technologies for integrated processing |h [electronic resource] : |b report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1992. | ||
| 300 | |a xii, 89 p. : |b ill. | ||
| 500 | |a "NMAB-461." | ||
| 504 | |a Includes bibliographical references. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectronics industry. | |
| 650 | 0 | |a Molecular beams |x Industrial applications. | |
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition |x Industrial applications. | |
| 655 | 4 | |a Electronic books. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3376029 |z Click to View |