Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
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| TeilnehmendeR: | |
| Year of Publication: | 1992 |
| Language: | English |
| Online Access: | |
| Physical Description: | xii, 89 p. :; ill. |
| Notes: | "NMAB-461." |
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| Bibliography: | Includes bibliographical references. |
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| ISBN: | 0309046351 |
| Hierarchical level: | Monograph |