Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
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Year of Publication: | 1992 |
Language: | English |
Online Access: | |
Physical Description: | xii, 89 p. :; ill. |
Notes: | "NMAB-461." |
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Bibliography: | Includes bibliographical references. |
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ISBN: | 0309046351 |
Hierarchical level: | Monograph |