Advanced micro-device engineering III : : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / / edited by Sumio Hosaka.
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| Place / Publishing House: | Durnten-Zurich, Switzerland : : Trans Tech Publications,, [2013] 2013 |
| Year of Publication: | 2013 |
| Language: | English |
| Series: | Key engineering materials ;
534 |
| Online Access: | |
| Physical Description: | 1 online resource (277 pages) :; illustrations. |
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| 020 | |z 9783037855393 | ||
| 020 | |a 9783038139201 |q (electronic bk.) | ||
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| 040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a T174.7 |b .I586 2013 | |
| 111 | 2 | |a International Conference on Advanced Micro-Device Engineering |n (3rd : |d 2011 : |c Kiryu-shi, Japan) | |
| 245 | 1 | 0 | |a Advanced micro-device engineering III : |b selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / |c edited by Sumio Hosaka. |
| 264 | 1 | |a Durnten-Zurich, Switzerland : |b Trans Tech Publications, |c [2013] | |
| 264 | 4 | |c 2013 | |
| 300 | |a 1 online resource (277 pages) : |b illustrations. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 440 | 0 | |a Key engineering materials ; |v 534 | |
| 504 | |a Includes bibliographical references and indexes. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed October 31, 2013). | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microtechnology |v Congresses. | |
| 650 | 0 | |a Mechatronics |v Congresses. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Hosaka, Sumio. | |
| 797 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1872994 |z Click to View |