Advanced micro-device engineering III : : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / / edited by Sumio Hosaka.
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| Place / Publishing House: | Durnten-Zurich, Switzerland : : Trans Tech Publications,, [2013] 2013 |
| Year of Publication: | 2013 |
| Language: | English |
| Series: | Key engineering materials ;
534 |
| Online Access: | |
| Physical Description: | 1 online resource (277 pages) :; illustrations. |
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| Bibliography: | Includes bibliographical references and indexes. |
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| ISBN: | 9783037855393 9783038139201 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Sumio Hosaka. |