Advanced micro-device engineering IV : : selected, peer reviewed papers from the 4th International Conference on Advanced Micro-Device Engineering (AMDE 2012), December 7, 2012, Kiryu City Performing Arts Center, Kiryu, Japan / / edited by Sumio Hosaka.
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| Superior document: | Key Engineering Materials, Volume 596 |
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| TeilnehmendeR: | |
| Place / Publishing House: | Durnten-Zurich, Switzerland : : Trans Tech Publications,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Series: | Key engineering materials ;
v. 596. |
| Online Access: | |
| Physical Description: | 1 online resource (228 pages) :; illustrations, tables. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and indexes. |
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| ISBN: | 9783037859629 9783038263432 |
| ISSN: | 1662-9795 ; |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Sumio Hosaka. |