Glancing angle deposition of thin films : : engineering the nanoscale / / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.

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Bibliographic Details
Superior document:Wiley Series in Materials for Electronic and Optoelectronic Applications
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Place / Publishing House:Chichester, England : : Wiley,, 2014.
2014
Year of Publication:2014
Language:English
Series:Wiley series in materials for electronic and optoelectronic applications.
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Physical Description:1 online resource (316 pages) :; illustrations (some color).
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