Glancing angle deposition of thin films : : engineering the nanoscale / / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.

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Superior document:Wiley Series in Materials for Electronic and Optoelectronic Applications
VerfasserIn:
TeilnehmendeR:
Place / Publishing House:Chichester, England : : Wiley,, 2014.
2014
Year of Publication:2014
Language:English
Series:Wiley series in materials for electronic and optoelectronic applications.
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Physical Description:1 online resource (316 pages) :; illustrations (some color).
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ctrlnum (MiAaPQ)5001729070
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(CaPaEBR)ebr10891175
(OCoLC)883570105
collection bib_alma
record_format marc
spelling Hawkeye, Matthew M., author.
Glancing angle deposition of thin films : engineering the nanoscale / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
Chichester, England : Wiley, 2014.
2014
1 online resource (316 pages) : illustrations (some color).
text rdacontent
computer rdamedia
online resource rdacarrier
Wiley Series in Materials for Electronic and Optoelectronic Applications
Includes bibliographical references at the end of each chapters and index.
Description based on print version record.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Nanotechnology.
Chemical vapor deposition.
Nanoelectromechanical systems Design and construction.
Electronic books.
Taschuk, Michael T., author.
Brett, Michael J., author.
Print version: Hawkeye, Matthew M. Glancing angle deposition of thin films : engineering the nanoscale. Chichester, England : Wiley, c2014 xiv, 299 pages Wiley series in materials for electronic and optoelectronic applications. 9781118847565 2014013307
ProQuest (Firm)
Wiley series in materials for electronic and optoelectronic applications.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1729070 Click to View
language English
format eBook
author Hawkeye, Matthew M.,
Taschuk, Michael T.,
Brett, Michael J.,
spellingShingle Hawkeye, Matthew M.,
Taschuk, Michael T.,
Brett, Michael J.,
Glancing angle deposition of thin films : engineering the nanoscale /
Wiley Series in Materials for Electronic and Optoelectronic Applications
author_facet Hawkeye, Matthew M.,
Taschuk, Michael T.,
Brett, Michael J.,
Taschuk, Michael T.,
Brett, Michael J.,
author_variant m m h mm mmh
m t t mt mtt
m j b mj mjb
author_role VerfasserIn
VerfasserIn
VerfasserIn
author2 Taschuk, Michael T.,
Brett, Michael J.,
author2_role TeilnehmendeR
TeilnehmendeR
author_sort Hawkeye, Matthew M.,
title Glancing angle deposition of thin films : engineering the nanoscale /
title_sub engineering the nanoscale /
title_full Glancing angle deposition of thin films : engineering the nanoscale / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
title_fullStr Glancing angle deposition of thin films : engineering the nanoscale / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
title_full_unstemmed Glancing angle deposition of thin films : engineering the nanoscale / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
title_auth Glancing angle deposition of thin films : engineering the nanoscale /
title_new Glancing angle deposition of thin films :
title_sort glancing angle deposition of thin films : engineering the nanoscale /
series Wiley Series in Materials for Electronic and Optoelectronic Applications
series2 Wiley Series in Materials for Electronic and Optoelectronic Applications
publisher Wiley,
publishDate 2014
physical 1 online resource (316 pages) : illustrations (some color).
isbn 9781118847329
9781118847565
callnumber-first T - Technology
callnumber-subject T - General Technology
callnumber-label T174
callnumber-sort T 3174.7 H39 42014
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1729070
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.3815/2
dewey-sort 3621.3815 12
dewey-raw 621.3815/2
dewey-search 621.3815/2
oclc_num 883570105
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hierarchy_parent_title Wiley Series in Materials for Electronic and Optoelectronic Applications
is_hierarchy_title Glancing angle deposition of thin films : engineering the nanoscale /
container_title Wiley Series in Materials for Electronic and Optoelectronic Applications
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