Glancing angle deposition of thin films : : engineering the nanoscale / / Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
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| Superior document: | Wiley Series in Materials for Electronic and Optoelectronic Applications |
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| VerfasserIn: | |
| TeilnehmendeR: | |
| Place / Publishing House: | Chichester, England : : Wiley,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Series: | Wiley series in materials for electronic and optoelectronic applications.
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| Online Access: | |
| Physical Description: | 1 online resource (316 pages) :; illustrations (some color). |
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| 020 | |z 9781118847565 | ||
| 020 | |a 9781118847329 |q (electronic bk.) | ||
| 035 | |a (MiAaPQ)5001729070 | ||
| 035 | |a (Au-PeEL)EBL1729070 | ||
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| 040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a T174.7 |b .H39 2014 | |
| 082 | 0 | |a 621.3815/2 |2 23 | |
| 100 | 1 | |a Hawkeye, Matthew M., |e author. | |
| 245 | 1 | 0 | |a Glancing angle deposition of thin films : |b engineering the nanoscale / |c Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett. |
| 264 | 1 | |a Chichester, England : |b Wiley, |c 2014. | |
| 264 | 4 | |c 2014 | |
| 300 | |a 1 online resource (316 pages) : |b illustrations (some color). | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a Wiley Series in Materials for Electronic and Optoelectronic Applications | |
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on print version record. | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Nanotechnology. | |
| 650 | 0 | |a Chemical vapor deposition. | |
| 650 | 0 | |a Nanoelectromechanical systems |x Design and construction. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Taschuk, Michael T., |e author. | |
| 700 | 1 | |a Brett, Michael J., |e author. | |
| 776 | 0 | 8 | |i Print version: |a Hawkeye, Matthew M. |t Glancing angle deposition of thin films : engineering the nanoscale. |d Chichester, England : Wiley, c2014 |h xiv, 299 pages |k Wiley series in materials for electronic and optoelectronic applications. |z 9781118847565 |w 2014013307 |
| 797 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Wiley series in materials for electronic and optoelectronic applications. | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1729070 |z Click to View |