Handbook of 3D integration. / Volume 3, : 3D process technology / / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
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| TeilnehmendeR: | |
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| Place / Publishing House: | Weinheim, Germany : : Wiley-VCH,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (475 pages) :; illustrations (some color) |
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