Handbook of 3D integration. / Volume 3, : 3D process technology / / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
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| Place / Publishing House: | Weinheim, Germany : : Wiley-VCH,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (475 pages) :; illustrations (some color) |
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| 082 | 0 | |a 621.3815 |2 23 | |
| 245 | 0 | 0 | |a Handbook of 3D integration. |n Volume 3, |p 3D process technology / |c edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors. |
| 264 | 1 | |a Weinheim, Germany : |b Wiley-VCH, |c 2014. | |
| 264 | 4 | |c 2014 | |
| 300 | |a 1 online resource (475 pages) : |b illustrations (some color) | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014). | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Integrated circuits. | |
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Silicon. | |
| 650 | 0 | |a Three-dimensional imaging. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Garrou, Philip, |e editor. | |
| 700 | 1 | |a Koyanagi, Mitsumasa, |e editor. | |
| 700 | 1 | |a Ramm, Peter, |e editor. | |
| 700 | 1 | |a Allen, Ricky, |e contributor. | |
| 776 | 0 | 8 | |i Print version: |t Handbook of 3D integration. Volume 3, 3D process technology. |d Weinheim, Germany : Wiley-VCH, c2014 |h xxii, 451 pages |z 9783527334667 |
| 797 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1680609 |z Click to View |