Handbook of 3D integration. / Volume 3, : 3D process technology / / edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors.
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Place / Publishing House: | Weinheim, Germany : : Wiley-VCH,, 2014. 2014 |
Year of Publication: | 2014 |
Language: | English |
Online Access: | |
Physical Description: | 1 online resource (475 pages) :; illustrations (some color) |
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Bibliography: | Includes bibliographical references at the end of each chapters and index. |
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ISBN: | 9783527334667 9783527670130 9783527670123 9783527670116 9783527670109 |
Hierarchical level: | Monograph |
Statement of Responsibility: | edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors. |