Atomic layer deposition : principles, characteristics, and nanotechnology applications / / Tommi Kaariainen ... [et al.].
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| TeilnehmendeR: | |
| Year of Publication: | 2013 |
| Edition: | 2nd ed. |
| Language: | English |
| Online Access: | |
| Physical Description: | xv, 253 p. :; ill. |
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