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Atomic layer deposition : principles, characteristics, and nanotechnology applications /

Atomic layer deposition : principles, characteristics, and nanotechnology applications / / Tommi Kaariainen ... [et al.].

Participants: Kaariainen, Tommi. [ ]; ProQuest (Firm) [ ]; ProQuest (Firm) [ TeilnehmendeR ]
Published: c2013.

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