MEMS/NEMS Sensors: Fabrication and Application
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...
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| Year of Publication: | 2019 |
| Language: | English |
| Physical Description: | 1 electronic resource (242 p.) |
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Koley, Goutam auth MEMS/NEMS Sensors: Fabrication and Application MEMS/NEMS Sensors MDPI - Multidisciplinary Digital Publishing Institute 2019 1 electronic resource (242 p.) text txt rdacontent computer c rdamedia online resource cr rdacarrier Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions. English vibrating ring gyroscope tunnel magnetoresistive effect optical sensor micro-NIR spectrometer pulse inertia force gas sensor wet etching oil detection glass welding spring design power consumption MEMS (micro-electro-mechanical system) back cavity deflection position detector magnetic MEMS single-layer SiO2 frequency tuning threshold accuracy suspended micro hotplate AlGaN/GaN circular HFETs quadrature modulation signal inertial switch nanoparticle sensor low noise photonic crystal nanobeam cavity floating slug infrared image backstepping approach microdroplet acceleration switch microgyroscope temperature uniformity methane microfluidic accelerometer design photonic crystal cavity anisotropy resonant frequency dual-mass MEMS gyroscope analytical model single crystal silicon temperature sensor micro fluidic refractive index sensor microwave measurement low zero-g offset femtosecond laser micropellistor rapid fabrication accelerometer tracking performance GaN diaphragm microactuator resistance parameter optomechanical sensor scanning grating mirror GaAs MMIC adaptive control frequency split frequency mismatch electrostatic force feedback thermoelectric power sensor squeeze-film damping silicon wideband Accelerometer readout bonding strength high temperature pressure sensors 3D simulation level-set method tetramethylammonium hydroxide (TMAH) 3-03921-634-1 Jahangir, Ifat auth |
| language |
English |
| format |
eBook |
| author |
Koley, Goutam |
| spellingShingle |
Koley, Goutam MEMS/NEMS Sensors: Fabrication and Application |
| author_facet |
Koley, Goutam Jahangir, Ifat |
| author_variant |
g k gk |
| author2 |
Jahangir, Ifat |
| author2_variant |
i j ij |
| author_sort |
Koley, Goutam |
| title |
MEMS/NEMS Sensors: Fabrication and Application |
| title_full |
MEMS/NEMS Sensors: Fabrication and Application |
| title_fullStr |
MEMS/NEMS Sensors: Fabrication and Application |
| title_full_unstemmed |
MEMS/NEMS Sensors: Fabrication and Application |
| title_auth |
MEMS/NEMS Sensors: Fabrication and Application |
| title_alt |
MEMS/NEMS Sensors |
| title_new |
MEMS/NEMS Sensors: Fabrication and Application |
| title_sort |
mems/nems sensors: fabrication and application |
| publisher |
MDPI - Multidisciplinary Digital Publishing Institute |
| publishDate |
2019 |
| physical |
1 electronic resource (242 p.) |
| isbn |
3-03921-635-X 3-03921-634-1 |
| illustrated |
Not Illustrated |
| work_keys_str_mv |
AT koleygoutam memsnemssensorsfabricationandapplication AT jahangirifat memsnemssensorsfabricationandapplication AT koleygoutam memsnemssensors AT jahangirifat memsnemssensors |
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n |
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(CKB)4100000010106289 (oapen)https://directory.doabooks.org/handle/20.500.12854/53149 (EXLCZ)994100000010106289 |
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cr |
| is_hierarchy_title |
MEMS/NEMS Sensors: Fabrication and Application |
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