MEMS/NEMS Sensors: Fabrication and Application
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...
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| Year of Publication: | 2019 |
| Language: | English |
| Physical Description: | 1 electronic resource (242 p.) |
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Electronic
| DOAB Directory of Open Access Books | Available |