Updates in Advanced Lithography / / edited by Sumio Hosaka.
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...
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| Place / Publishing House: | [Place of publication not identified] : : IntechOpen,, 2013. |
| Year of Publication: | 2013 |
| Language: | English |
| Physical Description: | 1 online resource (262 pages) |
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