Updates in Advanced Lithography / / edited by Sumio Hosaka.
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...
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Place / Publishing House: | [Place of publication not identified] : : IntechOpen,, 2013. |
Year of Publication: | 2013 |
Language: | English |
Physical Description: | 1 online resource (262 pages) |
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100 | 1 | |a Hosaka, Sumio |4 edt | |
245 | 0 | 0 | |a Updates in Advanced Lithography / |c edited by Sumio Hosaka. |
260 | |b IntechOpen |c 2013 | ||
264 | 1 | |a [Place of publication not identified] : |b IntechOpen, |c 2013. | |
300 | |a 1 online resource (262 pages) | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a computer |b c |2 rdamedia | ||
338 | |a online resource |b cr |2 rdacarrier | ||
588 | |a Description based on: online resource; title from PDF information screen (InTech, viewed October 19, 2022). | ||
504 | |a Includes bibliographical references and index. | ||
520 | |a Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications. | ||
546 | |a English | ||
650 | 0 | |a Condensed matter. | |
653 | |a Condensed matter physics (liquid state & solid state physics) | ||
776 | |z 953-51-1175-2 | ||
700 | 1 | |a Hosaka, Sumio, |e editor. | |
906 | |a BOOK | ||
ADM | |b 2023-02-22 03:31:22 Europe/Vienna |f system |c marc21 |a 2019-04-13 22:04:18 Europe/Vienna |g false | ||
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