Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler

Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler

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Bibliographic Details
VerfasserIn:
Bullis, W.Murray
Perkowitz, S
Seiler, D.G
Place / Publishing House:Washington : U.S.Government Printing Office, 1995
Year of Publication:1995
Language:###
Series:NIST Special Publication 400-98
Physical Description:51 S.
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spelling Bullis, W.Murray aut
Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
Washington U.S.Government Printing Office 1995
51 S.
NIST Special Publication 400-98
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Seiler, D.G aut
YWOAW MAG2-1 100317 2218198340004498
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author Bullis, W.Murray
Perkowitz, S
Seiler, D.G
spellingShingle Bullis, W.Murray
Perkowitz, S
Seiler, D.G
Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
NIST Special Publication
author_facet Bullis, W.Murray
Perkowitz, S
Seiler, D.G
Perkowitz, S
Seiler, D.G
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author2 Perkowitz, S
Seiler, D.G
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author_sort Bullis, W.Murray
title Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
title_full Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
title_fullStr Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
title_full_unstemmed Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
title_auth Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
title_new Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
title_sort survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry / w. murray bullis ; s. perkowitz ; d.g. seiler
series NIST Special Publication
series2 NIST Special Publication
publisher U.S.Government Printing Office
publishDate 1995
physical 51 S.
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