Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
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| VerfasserIn: | |
|---|---|
| Place / Publishing House: | Washington : U.S.Government Printing Office, 1995 |
| Year of Publication: | 1995 |
| Language: | ### |
| Series: | NIST Special Publication
400-98 |
| Physical Description: | 51 S. |
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| 100 | 1 | |a Bullis, W.Murray |4 aut | |
| 245 | 0 | 0 | |a Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler |
| 264 | 1 | |a Washington |b U.S.Government Printing Office |c 1995 | |
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| 490 | 0 | |a NIST Special Publication |v 400-98 | |
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| 700 | 1 | |a Seiler, D.G |4 aut | |
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