Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry / W. Murray Bullis ; S. Perkowitz ; D.G. Seiler
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| Place / Publishing House: | Washington : U.S.Government Printing Office, 1995 |
| Year of Publication: | 1995 |
| Language: | ### |
| Series: | NIST Special Publication
400-98 |
| Physical Description: | 51 S. |
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| ac_no: | YW00015685 |
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| Hierarchical level: | Monograph |