Plasma Chemistry / / hrsg. von S. Vepřek, M. Venugopalan.
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| Superior document: | Title is part of eBook package: De Gruyter DGBA Physical Sciences <1990 |
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| MitwirkendeR: | |
| HerausgeberIn: | |
| Place / Publishing House: | Berlin ;, Boston : : De Gruyter, , [2022] ©1981 |
| Year of Publication: | 2022 |
| Edition: | Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021 |
| Language: | German |
| Online Access: | |
| Physical Description: | 1 online resource (130 p.) |
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Table of Contents:
- Frontmatter
- Contents
- Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization
- The Mechanism and Kinetics of Plasma Polymerization
- Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas