Plasma Chemistry /

Plasma Chemistry / / hrsg. von S. Vepřek, M. Venugopalan.

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Superior document:Title is part of eBook package: De Gruyter DGBA Physical Sciences <1990
MitwirkendeR:
Bell, Alexis T.,
Coburn, John,
Dilks, Alan,
Kay, Eric,
Winters, Harold F.,
HerausgeberIn:
Venugopalan, M.,
Vepřek, S.,
Place / Publishing House:Berlin ;, Boston : : De Gruyter, , [2022]
©1981
Year of Publication:2022
Edition:Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021
Language:German
Online Access:
Physical Description:1 online resource (130 p.)
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id 9783112539545
ctrlnum (DE-B1597)603773
(OCoLC)1301549725
collection bib_alma
record_format marc
spelling Plasma Chemistry / hrsg. von S. Vepřek, M. Venugopalan.
Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021
Berlin ; Boston : De Gruyter, [2022]
©1981
1 online resource (130 p.)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
text file PDF rda
Frontmatter -- Contents -- Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization -- The Mechanism and Kinetics of Plasma Polymerization -- Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
restricted access http://purl.org/coar/access_right/c_16ec online access with authorization star
Issued also in print.
Mode of access: Internet via World Wide Web.
In German.
Description based on online resource; title from PDF title page (publisher's Web site, viewed 01. Dez 2022)
SCIENCE / Chemistry / Physical & Theoretical. bisacsh
Bell, Alexis T., contributor. ctb https://id.loc.gov/vocabulary/relators/ctb
Coburn, John, contributor. ctb https://id.loc.gov/vocabulary/relators/ctb
Dilks, Alan, contributor. ctb https://id.loc.gov/vocabulary/relators/ctb
Kay, Eric, contributor. ctb https://id.loc.gov/vocabulary/relators/ctb
Venugopalan, M., editor. edt http://id.loc.gov/vocabulary/relators/edt
Vepřek, S., editor. edt http://id.loc.gov/vocabulary/relators/edt
Winters, Harold F., contributor. ctb https://id.loc.gov/vocabulary/relators/ctb
Title is part of eBook package: De Gruyter DGBA Physical Sciences <1990 9783110637243 ZDB-23-GPS
print 9783112539538
https://doi.org/10.1515/9783112539545
https://www.degruyter.com/isbn/9783112539545
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language German
format eBook
author2 Bell, Alexis T.,
Bell, Alexis T.,
Coburn, John,
Coburn, John,
Dilks, Alan,
Dilks, Alan,
Kay, Eric,
Kay, Eric,
Venugopalan, M.,
Venugopalan, M.,
Vepřek, S.,
Vepřek, S.,
Winters, Harold F.,
Winters, Harold F.,
author_facet Bell, Alexis T.,
Bell, Alexis T.,
Coburn, John,
Coburn, John,
Dilks, Alan,
Dilks, Alan,
Kay, Eric,
Kay, Eric,
Venugopalan, M.,
Venugopalan, M.,
Vepřek, S.,
Vepřek, S.,
Winters, Harold F.,
Winters, Harold F.,
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author_sort Bell, Alexis T.,
title Plasma Chemistry /
spellingShingle Plasma Chemistry /
Frontmatter --
Contents --
Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization --
The Mechanism and Kinetics of Plasma Polymerization --
Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
title_full Plasma Chemistry / hrsg. von S. Vepřek, M. Venugopalan.
title_fullStr Plasma Chemistry / hrsg. von S. Vepřek, M. Venugopalan.
title_full_unstemmed Plasma Chemistry / hrsg. von S. Vepřek, M. Venugopalan.
title_auth Plasma Chemistry /
title_alt Frontmatter --
Contents --
Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization --
The Mechanism and Kinetics of Plasma Polymerization --
Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
title_new Plasma Chemistry /
title_sort plasma chemistry /
publisher De Gruyter,
publishDate 2022
physical 1 online resource (130 p.)
Issued also in print.
edition Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021
contents Frontmatter --
Contents --
Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization --
The Mechanism and Kinetics of Plasma Polymerization --
Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
isbn 9783112539545
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url https://doi.org/10.1515/9783112539545
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illustrated Not Illustrated
doi_str_mv 10.1515/9783112539545
oclc_num 1301549725
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AT wintersharoldf plasmachemistry
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carrierType_str_mv cr
hierarchy_parent_title Title is part of eBook package: De Gruyter DGBA Physical Sciences <1990
is_hierarchy_title Plasma Chemistry /
container_title Title is part of eBook package: De Gruyter DGBA Physical Sciences <1990
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