Handbook of cleaning for semiconductor manufacturing : fundamentals and applications /

Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / / Karen A. Reinhardt, Richard F. Reidy.

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ProQuest (Firm)
Reinhardt, Karen A.
TeilnehmendeR:
Reidy, Richard F., 1960-
ProQuest (Firm)
Year of Publication:2011
Language:English
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Physical Description:xxii, 590 p. :; ill.
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record_format marc
spelling Reinhardt, Karen A.
Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011.
xxii, 590 p. : ill.
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Semiconductors Surfaces Cleaning.
Surface preparation.
Electronic books.
Reidy, Richard F., 1960-
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=700543 Click to View
language English
format Electronic
eBook
author Reinhardt, Karen A.
spellingShingle Reinhardt, Karen A.
Handbook of cleaning for semiconductor manufacturing fundamentals and applications /
author_facet Reinhardt, Karen A.
Reidy, Richard F., 1960-
ProQuest (Firm)
ProQuest (Firm)
author_variant k a r ka kar
author2 Reidy, Richard F., 1960-
ProQuest (Firm)
author2_variant r f r rf rfr
author2_role TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Reinhardt, Karen A.
title Handbook of cleaning for semiconductor manufacturing fundamentals and applications /
title_sub fundamentals and applications /
title_full Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
title_fullStr Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
title_full_unstemmed Handbook of cleaning for semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
title_auth Handbook of cleaning for semiconductor manufacturing fundamentals and applications /
title_new Handbook of cleaning for semiconductor manufacturing
title_sort handbook of cleaning for semiconductor manufacturing fundamentals and applications /
publisher John Wiley & Sons, Inc.,
publishDate 2011
physical xxii, 590 p. : ill.
callnumber-first Q - Science
callnumber-subject QC - Physics
callnumber-label QC611
callnumber-sort QC 3611.6 S9 R456 42011
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=700543
illustrated Illustrated
oclc_num 782860596
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