Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / / Karen A. Reinhardt, Richard F. Reidy.
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| Year of Publication: | 2011 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxii, 590 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 0470625953 1118071743 9780470625958 9781118071731 9781118071748 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Karen A. Reinhardt, Richard F. Reidy. |