Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / / Karen A. Reinhardt, Richard F. Reidy.
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| TeilnehmendeR: | |
| Year of Publication: | 2011 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxii, 590 p. :; ill. |
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| 020 | |z 9780470625958 | ||
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| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a QC611.6.S9 |b R456 2011 | |
| 100 | 1 | |a Reinhardt, Karen A. | |
| 245 | 1 | 0 | |a Handbook of cleaning for semiconductor manufacturing |h [electronic resource] : |b fundamentals and applications / |c Karen A. Reinhardt, Richard F. Reidy. |
| 260 | |a Salem, Mass. ; |a Scrivener ; |a Hoboken, N.J. : |b John Wiley & Sons, Inc., |c c2011. | ||
| 300 | |a xxii, 590 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Semiconductors |x Surfaces |x Cleaning. | |
| 650 | 0 | |a Surface preparation. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Reidy, Richard F., |d 1960- | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=700543 |z Click to View |