Fluorinated SiC CVD.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1826 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2017. {copy}2017. |
| Year of Publication: | 2017 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (59 pages) |
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Table of Contents:
- Intro
- ABSTRACT
- POPULÄRVETENSKAPLIG SAMMANFATTNING
- PAPERS INCLUDED IN THE THESIS
- MY CONTRIBUTION TO THE PAPERS
- ACKNOWLEDGMENT
- CONTENTS
- CHAPTER 1 INTRODUCTION
- CHAPTER 2 SILICON CARBIDE
- CHAPTER 3 GROWTH METHODS
- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR
- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS
- CHAPTER 6 MODELLING
- CHAPTER 7 CHARACTERIZATION
- CHAPTER 8 FUTURE WORK
- REFERENCES
- SUMMARY OF THE INCLUDED PAPERS.