Fluorinated SiC CVD.
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Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.1826 |
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Place / Publishing House: | Linköping : : Linkopings Universitet,, 2017. {copy}2017. |
Year of Publication: | 2017 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Online Access: | |
Physical Description: | 1 online resource (59 pages) |
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100 | 1 | |a Stenberg, Pontus. | |
245 | 1 | 0 | |a Fluorinated SiC CVD. |
250 | |a 1st ed. | ||
264 | 1 | |a Linköping : |b Linkopings Universitet, |c 2017. | |
264 | 4 | |c {copy}2017. | |
300 | |a 1 online resource (59 pages) | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a computer |b c |2 rdamedia | ||
338 | |a online resource |b cr |2 rdacarrier | ||
490 | 1 | |a Linköping Studies in Science and Technology. Dissertations Series ; |v v.1826 | |
505 | 0 | |a Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PAPERS INCLUDED IN THE THESIS -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGMENT -- CONTENTS -- CHAPTER 1 INTRODUCTION -- CHAPTER 2 SILICON CARBIDE -- CHAPTER 3 GROWTH METHODS -- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR -- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS -- CHAPTER 6 MODELLING -- CHAPTER 7 CHARACTERIZATION -- CHAPTER 8 FUTURE WORK -- REFERENCES -- SUMMARY OF THE INCLUDED PAPERS. | |
588 | |a Description based on publisher supplied metadata and other sources. | ||
590 | |a Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. | ||
655 | 4 | |a Electronic books. | |
776 | 0 | 8 | |i Print version: |a Stenberg, Pontus |t Fluorinated SiC CVD |d Linköping : Linkopings Universitet,c2017 |
797 | 2 | |a ProQuest (Firm) | |
830 | 0 | |a Linköping Studies in Science and Technology. Dissertations Series | |
856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=4800313 |z Click to View |