Fluorinated SiC CVD.

Fluorinated SiC CVD.

Saved in:
Bibliographic Details
Superior document:Linköping Studies in Science and Technology. Dissertations Series ; v.1826
:
Stenberg, Pontus.
Place / Publishing House:Linköping : : Linkopings Universitet,, 2017.
{copy}2017.
Year of Publication:2017
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Dissertations Series
Online Access:
Physical Description:1 online resource (59 pages)
Tags: Add Tag
No Tags, Be the first to tag this record!
id 5004800313
ctrlnum (MiAaPQ)5004800313
(Au-PeEL)EBL4800313
(CaPaEBR)ebr11338800
(OCoLC)972289864
collection bib_alma
record_format marc
spelling Stenberg, Pontus.
Fluorinated SiC CVD.
1st ed.
Linköping : Linkopings Universitet, 2017.
{copy}2017.
1 online resource (59 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Dissertations Series ; v.1826
Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PAPERS INCLUDED IN THE THESIS -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGMENT -- CONTENTS -- CHAPTER 1 INTRODUCTION -- CHAPTER 2 SILICON CARBIDE -- CHAPTER 3 GROWTH METHODS -- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR -- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS -- CHAPTER 6 MODELLING -- CHAPTER 7 CHARACTERIZATION -- CHAPTER 8 FUTURE WORK -- REFERENCES -- SUMMARY OF THE INCLUDED PAPERS.
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Stenberg, Pontus Fluorinated SiC CVD Linköping : Linkopings Universitet,c2017
ProQuest (Firm)
Linköping Studies in Science and Technology. Dissertations Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=4800313 Click to View
language English
format eBook
author Stenberg, Pontus.
spellingShingle Stenberg, Pontus.
Fluorinated SiC CVD.
Linköping Studies in Science and Technology. Dissertations Series ;
Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PAPERS INCLUDED IN THE THESIS -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGMENT -- CONTENTS -- CHAPTER 1 INTRODUCTION -- CHAPTER 2 SILICON CARBIDE -- CHAPTER 3 GROWTH METHODS -- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR -- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS -- CHAPTER 6 MODELLING -- CHAPTER 7 CHARACTERIZATION -- CHAPTER 8 FUTURE WORK -- REFERENCES -- SUMMARY OF THE INCLUDED PAPERS.
author_facet Stenberg, Pontus.
author_variant p s ps
author_sort Stenberg, Pontus.
title Fluorinated SiC CVD.
title_full Fluorinated SiC CVD.
title_fullStr Fluorinated SiC CVD.
title_full_unstemmed Fluorinated SiC CVD.
title_auth Fluorinated SiC CVD.
title_new Fluorinated SiC CVD.
title_sort fluorinated sic cvd.
series Linköping Studies in Science and Technology. Dissertations Series ;
series2 Linköping Studies in Science and Technology. Dissertations Series ;
publisher Linkopings Universitet,
publishDate 2017
physical 1 online resource (59 pages)
edition 1st ed.
contents Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PAPERS INCLUDED IN THE THESIS -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGMENT -- CONTENTS -- CHAPTER 1 INTRODUCTION -- CHAPTER 2 SILICON CARBIDE -- CHAPTER 3 GROWTH METHODS -- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR -- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS -- CHAPTER 6 MODELLING -- CHAPTER 7 CHARACTERIZATION -- CHAPTER 8 FUTURE WORK -- REFERENCES -- SUMMARY OF THE INCLUDED PAPERS.
isbn 9789176855911
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=4800313
illustrated Not Illustrated
oclc_num 972289864
work_keys_str_mv AT stenbergpontus fluorinatedsiccvd
status_str n
ids_txt_mv (MiAaPQ)5004800313
(Au-PeEL)EBL4800313
(CaPaEBR)ebr11338800
(OCoLC)972289864
carrierType_str_mv cr
hierarchy_parent_title Linköping Studies in Science and Technology. Dissertations Series ; v.1826
is_hierarchy_title Fluorinated SiC CVD.
container_title Linköping Studies in Science and Technology. Dissertations Series ; v.1826
marc_error Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ]
_version_ 1792331054553497600
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02018nam a22003853i 4500</leader><controlfield tag="001">5004800313</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20240229073830.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cnu||||||||</controlfield><controlfield tag="008">240229s2017 xx o ||||0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9789176855911</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5004800313</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL4800313</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr11338800</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)972289864</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="e">pn</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Stenberg, Pontus.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Fluorinated SiC CVD.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1st ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Linköping :</subfield><subfield code="b">Linkopings Universitet,</subfield><subfield code="c">2017.</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">{copy}2017.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (59 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series ;</subfield><subfield code="v">v.1826</subfield></datafield><datafield tag="505" ind1="0" ind2=" "><subfield code="a">Intro -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PAPERS INCLUDED IN THE THESIS -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGMENT -- CONTENTS -- CHAPTER 1 INTRODUCTION -- CHAPTER 2 SILICON CARBIDE -- CHAPTER 3 GROWTH METHODS -- CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR -- CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS -- CHAPTER 6 MODELLING -- CHAPTER 7 CHARACTERIZATION -- CHAPTER 8 FUTURE WORK -- REFERENCES -- SUMMARY OF THE INCLUDED PAPERS.</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on publisher supplied metadata and other sources.</subfield></datafield><datafield tag="590" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries. </subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Stenberg, Pontus</subfield><subfield code="t">Fluorinated SiC CVD</subfield><subfield code="d">Linköping : Linkopings Universitet,c2017</subfield></datafield><datafield tag="797" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Linköping Studies in Science and Technology. Dissertations Series</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=4800313</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>

Similar Items