Fundamental principles of optical lithography : the science of microfabrication /

Fundamental principles of optical lithography : the science of microfabrication / / Chris Mack.

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ProQuest (Firm)
Mack, Chris A.
TeilnehmendeR:
ProQuest (Firm)
Year of Publication:2007
Language:English
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Physical Description:xvii, 515 p. :; ill.
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record_format marc
spelling Mack, Chris A.
Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
xvii, 515 p. : ill.
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Integrated circuits Design and construction.
Microlithography Industrial applications.
Electronic books.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=470628 Click to View
language English
format Electronic
eBook
author Mack, Chris A.
spellingShingle Mack, Chris A.
Fundamental principles of optical lithography the science of microfabrication /
author_facet Mack, Chris A.
ProQuest (Firm)
ProQuest (Firm)
author_variant c a m ca cam
author2 ProQuest (Firm)
author2_role TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Mack, Chris A.
title Fundamental principles of optical lithography the science of microfabrication /
title_sub the science of microfabrication /
title_full Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
title_fullStr Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
title_full_unstemmed Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
title_auth Fundamental principles of optical lithography the science of microfabrication /
title_new Fundamental principles of optical lithography
title_sort fundamental principles of optical lithography the science of microfabrication /
publisher Wiley,
publishDate 2007
physical xvii, 515 p. : ill.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7874
callnumber-sort TK 47874 M196 42007
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=470628
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.3815/31
dewey-sort 3621.3815 231
dewey-raw 621.3815/31
dewey-search 621.3815/31
oclc_num 608624290
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is_hierarchy_title Fundamental principles of optical lithography the science of microfabrication /
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