Fundamental principles of optical lithography : the science of microfabrication / / Chris Mack.
Saved in:
| : | |
|---|---|
| TeilnehmendeR: | |
| Year of Publication: | 2007 |
| Language: | English |
| Online Access: | |
| Physical Description: | xvii, 515 p. :; ill. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Bibliography: | Includes bibliographical references and index. |
|---|---|
| ISBN: | 9780470018934 0470018933 9780470727300 (pbk.) 0470727306 (pbk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Chris Mack. |