Fundamental principles of optical lithography : the science of microfabrication / / Chris Mack.
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| Year of Publication: | 2007 |
| Language: | English |
| Online Access: | |
| Physical Description: | xvii, 515 p. :; ill. |
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| LEADER | 01507nam a2200409 a 4500 | ||
|---|---|---|---|
| 001 | 500470628 | ||
| 003 | MiAaPQ | ||
| 005 | 20200520144314.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 071026s2007 enka sb 001 0 eng | ||
| 010 | |z 2007044548 | ||
| 015 | |a GBA791483 |2 bnb | ||
| 016 | 7 | |z 014276990 |2 Uk | |
| 020 | |z 9780470018934 | ||
| 020 | |z 0470018933 | ||
| 020 | |z 9780470727300 (pbk.) | ||
| 020 | |z 0470727306 (pbk.) | ||
| 035 | |a (MiAaPQ)500470628 | ||
| 035 | |a (Au-PeEL)EBL470628 | ||
| 035 | |a (CaPaEBR)ebr10300846 | ||
| 035 | |a (CaONFJC)MIL234881 | ||
| 035 | |a (OCoLC)608624290 | ||
| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7874 |b .M196 2007 | |
| 082 | 0 | 4 | |a 621.3815/31 |2 22 |
| 100 | 1 | |a Mack, Chris A. | |
| 245 | 1 | 0 | |a Fundamental principles of optical lithography |h [electronic resource] : |b the science of microfabrication / |c Chris Mack. |
| 260 | |a Chichester, West Sussex, England ; |a Hoboken, NJ, USA : |b Wiley, |c c2007. | ||
| 300 | |a xvii, 515 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Microlithography |x Industrial applications. | |
| 655 | 4 | |a Electronic books. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=470628 |z Click to View |