Plasma processing of materials : scientific opportunities and technological challenges /

Plasma processing of materials : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

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National Research Council (U.S.). Panel on Plasma Processing of Materials.
TeilnehmendeR:
ProQuest (Firm)
Year of Publication:1991
Language:English
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Physical Description:xii, 75 p. :; ill.
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spelling National Research Council (U.S.). Panel on Plasma Processing of Materials.
Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Washington, D.C. : National Academy Press, 1991.
xii, 75 p. : ill.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Plasma engineering.
Microelectronics Materials Effect of radiation on.
Surfaces (Technology)
Electronic books.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3376299 Click to View
language English
format Electronic
eBook
author2 ProQuest (Firm)
author_facet ProQuest (Firm)
National Research Council (U.S.). Panel on Plasma Processing of Materials.
ProQuest (Firm)
author2_role TeilnehmendeR
author_corporate National Research Council (U.S.). Panel on Plasma Processing of Materials.
ProQuest (Firm)
author_sort National Research Council (U.S.). Panel on Plasma Processing of Materials.
title Plasma processing of materials scientific opportunities and technological challenges /
spellingShingle Plasma processing of materials scientific opportunities and technological challenges /
title_sub scientific opportunities and technological challenges /
title_full Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
title_fullStr Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
title_full_unstemmed Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
title_auth Plasma processing of materials scientific opportunities and technological challenges /
title_new Plasma processing of materials
title_sort plasma processing of materials scientific opportunities and technological challenges /
publisher National Academy Press,
publishDate 1991
physical xii, 75 p. : ill.
callnumber-first T - Technology
callnumber-subject TA - General and Civil Engineering
callnumber-label TA2005
callnumber-sort TA 42005 N37 41991
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3376299
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.044
dewey-sort 3621.044
dewey-raw 621.044
dewey-search 621.044
oclc_num 923262698
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