Plasma processing of materials : scientific opportunities and technological challenges /

Plasma processing of materials : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

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National Research Council (U.S.). Panel on Plasma Processing of Materials.
TeilnehmendeR:
ProQuest (Firm)
Year of Publication:1991
Language:English
Online Access:
Physical Description:xii, 75 p. :; ill.
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110 2 |a National Research Council (U.S.).  |b Panel on Plasma Processing of Materials. 
245 1 0 |a Plasma processing of materials  |h [electronic resource] :  |b scientific opportunities and technological challenges /  |c Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. 
260 |a Washington, D.C. :  |b National Academy Press,  |c 1991. 
300 |a xii, 75 p. :  |b ill. 
533 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Plasma engineering. 
650 0 |a Microelectronics  |x Materials  |x Effect of radiation on. 
650 0 |a Surfaces (Technology) 
655 4 |a Electronic books. 
710 2 |a ProQuest (Firm) 
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