Plasma processing of materials : scientific opportunities and technological challenges / / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
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| TeilnehmendeR: | |
| Year of Publication: | 1991 |
| Language: | English |
| Online Access: | |
| Physical Description: | xii, 75 p. :; ill. |
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| ISBN: | 0309045975 |
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| Hierarchical level: | Monograph |
| Statement of Responsibility: | Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |