Silicon Oxynitride Thin Films Grown by Reactive HiPIMS.
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Superior document: | Linköping Studies in Science and Technology. Thesis Series ; v.1737 |
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Place / Publishing House: | Linköping : : Linkopings Universitet,, 2015. {copy}2015. |
Year of Publication: | 2015 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Thesis Series
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Online Access: | |
Physical Description: | 1 online resource (41 pages) |
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