Ion implantation and activation.

Ion implantation and activation. / Volume 2 / / Kunihiro Suzuki.

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Suzuki, Kunihiro.
Place / Publishing House:Sharjah : : Bentham Science Publishers,, 2013.
Year of Publication:2013
Language:English
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Physical Description:1 online resource (171 pages) :; illustrations
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record_format marc
spelling Suzuki, Kunihiro.
Ion implantation and activation. Volume 2 / Kunihiro Suzuki.
Sharjah : Bentham Science Publishers, 2013.
1 online resource (171 pages) : illustrations
text rdacontent
computer rdamedia
online resource rdacarrier
Includes bibliographical references and index.
Description based on online resource; title from PDF title page (ebrary, viewed January 12, 2014).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Ion implantation.
Ion accelerators.
Electronic books.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1572232 Click to View
language English
format eBook
author Suzuki, Kunihiro.
spellingShingle Suzuki, Kunihiro.
Ion implantation and activation.
author_facet Suzuki, Kunihiro.
author_variant k s ks
author_sort Suzuki, Kunihiro.
title Ion implantation and activation.
title_full Ion implantation and activation. Volume 2 / Kunihiro Suzuki.
title_fullStr Ion implantation and activation. Volume 2 / Kunihiro Suzuki.
title_full_unstemmed Ion implantation and activation. Volume 2 / Kunihiro Suzuki.
title_auth Ion implantation and activation.
title_new Ion implantation and activation.
title_sort ion implantation and activation.
publisher Bentham Science Publishers,
publishDate 2013
physical 1 online resource (171 pages) : illustrations
isbn 9781608057900
callnumber-first Q - Science
callnumber-subject QC - Physics
callnumber-label QC702
callnumber-sort QC 3702.7 I55 S89 42013
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1572232
illustrated Illustrated
oclc_num 865331834
work_keys_str_mv AT suzukikunihiro ionimplantationandactivationvolume2
status_str n
ids_txt_mv (MiAaPQ)5001572232
(Au-PeEL)EBL1572232
(CaPaEBR)ebr10817741
(OCoLC)865331834
is_hierarchy_title Ion implantation and activation.
_version_ 1792330764028739584

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