Electromechanics and MEMS / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology.
"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessa...
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Year of Publication: | 2013 |
Language: | English |
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Physical Description: | xx, 559 p. :; ill. |
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Jones, T. B. (Thomas Byron), 1944- Electromechanics and MEMS [electronic resource] / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology. Cambridge : Cambridge University Press, 2013. xx, 559 p. : ill. Includes bibliographical references and index. Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS. "Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"-- Provided by publisher. Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. Microelectromechanical systems. Electronic books. Nenadic, Nenad G. ProQuest (Firm) https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1099805 Click to View |
language |
English |
format |
Electronic eBook |
author |
Jones, T. B. 1944- |
spellingShingle |
Jones, T. B. 1944- Electromechanics and MEMS Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS. |
author_facet |
Jones, T. B. 1944- Nenadic, Nenad G. ProQuest (Firm) ProQuest (Firm) |
author_variant |
t b j tb tbj |
author_fuller |
(Thomas Byron), |
author2 |
Nenadic, Nenad G. ProQuest (Firm) |
author2_variant |
n g n ng ngn |
author2_role |
TeilnehmendeR TeilnehmendeR |
author_corporate |
ProQuest (Firm) |
author_sort |
Jones, T. B. 1944- |
title |
Electromechanics and MEMS |
title_full |
Electromechanics and MEMS [electronic resource] / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology. |
title_fullStr |
Electromechanics and MEMS [electronic resource] / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology. |
title_full_unstemmed |
Electromechanics and MEMS [electronic resource] / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology. |
title_auth |
Electromechanics and MEMS |
title_new |
Electromechanics and MEMS |
title_sort |
electromechanics and mems |
publisher |
Cambridge University Press, |
publishDate |
2013 |
physical |
xx, 559 p. : ill. |
contents |
Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS. |
isbn |
9781139611602 (electronic bk.) |
callnumber-first |
T - Technology |
callnumber-subject |
TK - Electrical and Nuclear Engineering |
callnumber-label |
TK7875 |
callnumber-sort |
TK 47875 J66 42013 |
genre |
Electronic books. |
genre_facet |
Electronic books. |
url |
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1099805 |
illustrated |
Illustrated |
dewey-hundreds |
600 - Technology |
dewey-tens |
620 - Engineering |
dewey-ones |
621 - Applied physics |
dewey-full |
621.381 |
dewey-sort |
3621.381 |
dewey-raw |
621.381 |
dewey-search |
621.381 |
oclc_num |
842885418 |
work_keys_str_mv |
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(MiAaPQ)5001099805 (Au-PeEL)EBL1099805 (CaPaEBR)ebr10695303 (CaONFJC)MIL485881 (OCoLC)842885418 |
is_hierarchy_title |
Electromechanics and MEMS |
author2_original_writing_str_mv |
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