Electromechanics and MEMS / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology.
"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessa...
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| Year of Publication: | 2013 |
| Language: | English |
| Online Access: | |
| Physical Description: | xx, 559 p. :; ill. |
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| 010 | |z 2012021830 | ||
| 020 | |z 9780521764834 (hardback) | ||
| 020 | |a 9781139611602 (electronic bk.) | ||
| 035 | |a (MiAaPQ)5001099805 | ||
| 035 | |a (Au-PeEL)EBL1099805 | ||
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| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7875 |b .J66 2013 | |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 100 | 1 | |a Jones, T. B. |q (Thomas Byron), |d 1944- | |
| 245 | 1 | 0 | |a Electromechanics and MEMS |h [electronic resource] / |c Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology. |
| 260 | |a Cambridge : |b Cambridge University Press, |c 2013. | ||
| 300 | |a xx, 559 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 8 | |a Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS. | |
| 520 | |a "Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"-- |c Provided by publisher. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Nenadic, Nenad G. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1099805 |z Click to View |